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Growth and Synthesis
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Growth and Synthesis
Excimer Laser 1 (LPX Pro, Institute of Applied Physics)
Excimer Laser 2 (Compex)
PLD System 2 (Pascal) with RHEED
PLD System 4 (Pascal) with RHEED
PLD System
Box Furnace
UHV Sputter
ALD
DI-Purifier
Dry Oven
Fume Hood
Thermal Evaporator
E beam evaporator
Press Machine
